Evaluation of Stages of Nano-cmm
نویسندگان
چکیده
The Coordinate Measuring Machines (CMMs) are widely used for the three-dimensional measurements of workpieces. For solving the limits and the drawbacks of the traditional CMMs, we have started developing nano-CMM that measures three dimensional parts in nanometer resolution. In this article, we evaluate the repeatability and the straightness of stages of nano-CMM.
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